The amorphous chalcogenide thin films were obtained by means of (co-)sputtering on 200 mm Si(001) substrates from either a single or up to simultaneously three targets of pure chalcogenide compounds.
The P 1 Ga 5 Ge 20 Sb 9 Se 45 Te 20 (PS-1), P 3 Ga 5 Ge 20 Sb 7 Se 45 Te 20 (PS-3), P 5 Ga 5 Ge 20 Sb 5 Se 45 Te 20 (PS-5), P 7 Ga 5 Ge 20 Sb 3 Se 45 Te 20 (PS-7), P ...
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